Method of forming sputtering articles by multidirectional...

Details Method of forming sputtering articles by multidirectional... Method of forming sputtering articles by multidirectional...

2007-06-12

2007-06-12

Larson, Lowell A. (Department: 3725)

Metal deforming

Process

With attenuation, thickening, elongating or shortening of...

C148S422000, C204S192100

Reexamination Certificate

active

10859456

ABSTRACT:
A method of producing a valve metal mill form having dimensions sufficient to be divided to form a plurality of sputter targets is described. The method includes multidirectional deformation of an ingot to form a mill form having a preferred average grain size of about 100 microns or less and/or a texture substantially void of textural bands.

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