Method of forming silicon nitride coating

Details Method of forming silicon nitride coating Method of forming silicon nitride coating

1987-09-14

1988-05-03

Bell, Janyce A.

Coating processes

Interior of hollow article coating

Rotating the article

427233, 427237, 427238, 427251, 427252, 427253, 427255, 4272552, 427294, 118730, B05D 722

Patent

active

047419253

ABSTRACT:
A silicon nitride coating is deposited on the inside surface of a crucible by pyrolysis. Reactive gases are fed through a tube into the crucible. The crucible is rotated during deposition and the crucible walls are maintained at a temperature of at least about 1250.degree. C.

REFERENCES:
patent: 4058579 (1977-11-01), Laskway
patent: 4610896 (1986-09-01), Veltri
patent: 4699825 (1987-10-01), Sakai et al.

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