Method of forming si-o containing coatings

Details Method of forming si-o containing coatings Method of forming si-o containing coatings

1994-04-11

1996-08-20

Utech, Benjamin

Coating processes

Electrical product produced

Metallic compound coating

427227, 4273762, 427377, 427387, B05P 512

Patent

active

055477038

ABSTRACT:
Disclosed is a method for forming improved Si-O containing coatings on electronic substrates. The method comprises heating a hydrogen silsesquioxane resin successively under wet ammonia, dry ammonia and oxygen. The resultant coatings have improved properties such as low dielectric constants.

REFERENCES:
patent: 4847162 (1989-07-01), Haluska et al.

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