Method of forming Si-O containing coatings

Details Method of forming Si-O containing coatings Method of forming Si-O containing coatings

1993-09-22

1995-08-15

Lusignan, Michael

Coating processes

Heat decomposition of applied coating or base material

Coating decomposed to form carbide or coating carbonized

427377, 427387, 4273977, 427579, 428688, 437238, B05D 302

Patent

active

054417651

ABSTRACT:
Disclosed is a method for forming improved Si--0 containing coatings on electronic substrate. The method comprises treating Si--0 containing ceramic coatings derived from hydrogen silsesquioxane resin with hydrogen gas. The resultant coatings have improved properties such as stable dielectric constants.

REFERENCES:
patent: 4756977 (1988-07-01), Haluska et al.
patent: 5320868 (1994-06-01), Ballance et al.

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