Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step acting on the...
Patent
1996-05-01
1998-06-23
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth with a subsequent step acting on the...
117 3, 117902, C30B 2802
Patent
active
057699410
ABSTRACT:
(26) to the pull direction (23) used for growing a semiconductor ingot (36). Dislocations (34) in the ingot (36) terminate on the surface of the neck (37) of the ingot, and do not propagate into the body (38) of the ingot (36).
REFERENCES:
patent: 2858730 (1958-11-01), Hanson
patent: 4096025 (1978-06-01), Caslovsky et al.
patent: 4908094 (1990-03-01), Hosoi et al.
Garrett Felisa
Hightower Robert F.
Motorola Inc.
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