Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
Reexamination Certificate
2006-05-02
2006-05-02
Clark, S. V. (Department: 2823)
Semiconductor device manufacturing: process
Gettering of substrate
By layers which are coated, contacted, or diffused
C257S471000
Reexamination Certificate
active
07037808
ABSTRACT:
The invention includes a semiconductor construction. The construction has a semiconductor material die with a front surface, a back surface in opposing relation to the front surface, and a thickness of less than 400 microns between the front and back surfaces. The construction also has circuitry associated with the die and over the front surface of the die, and a layer touching the back surface of the die. The layer can correspond to getter-inducing material and/or to a stress-inducing material. The layer can have a composition which includes silicon dioxide and/or silicon nitride. The composition can include one or more hydrogen isotopes, and the hydrogen isotopes can have a higher abundance of deuterium than the natural abundance of deuterium.
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Jiang Tongbi
Yin Zhiping
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