Method of forming robust metal, metal oxide, and metal alloy lay

Details Method of forming robust metal, metal oxide, and metal alloy lay Method of forming robust metal, metal oxide, and metal alloy lay

1998-01-06

2000-06-20

Nuzzolillo, Maria

Chemistry: electrical current producing apparatus, product, and

With pressure equalizing means for liquid immersion operation

429 29, 429 40, 429 46, 134 1, 134 12, 134 13, 427 38, 427 39, 20419214, H01M 402

Patent

active

060776218

ABSTRACT:
The invention is to a dual beam process for providing an ion-conducting membrane with a thin metal or metal-oxide film. The process includes the cleaning of a membrane surface with a low energy electron beam followed by the deposition of the metal or metal-oxide film by a high energy electron beam of ions.

REFERENCES:
patent: 4277147 (1981-07-01), Arnoldussen
patent: 4278493 (1981-07-01), Petvai
patent: 5032421 (1991-07-01), Sarma
patent: 5631099 (1997-05-01), Hockaday
patent: 5652044 (1997-07-01), Rickerby
patent: 5748438 (1998-05-01), Davis
patent: 5750013 (1998-05-01), Lin
patent: 5849093 (1998-12-01), Andra

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