Method of forming refractory metal conductors of low resistivity

Details Method of forming refractory metal conductors of low resistivity Method of forming refractory metal conductors of low resistivity

1983-04-28

1984-09-11

Smith, John D.

Coating processes

Electrical product produced

Condenser or capacitor

427 96, 148 63, B05D 512, C23C 1100

Patent

active

044710046

ABSTRACT:
The resistivity of a conductor of a refractory metal such as molybdenum is reduced by converting at least a portion of the conductor into a layer of molybdenum nitride in an atmosphere including ammonia at a temperature in the range from about 400.degree. C. to about 850.degree. C. and thereafter heating the conductor in an atmosphere including dry hydrogen in the range from about 950.degree. C. to about 1000.degree. C. for a time to convert the layer of molybdenum nitride into molybdenum and to convert molybdenum oxides in the conductor into molybdenum.

REFERENCES:
patent: 3577275 (1971-05-01), Kosco
patent: 3785862 (1974-01-01), Grill

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