Method of forming platinum and platinum silicide schottky contac

Details Method of forming platinum and platinum silicide schottky contac Method of forming platinum and platinum silicide schottky contac

1992-07-28

1993-12-14

Quach, T. N.

Fishing, trapping, and vermin destroying

437100, 437179, 437178, 148DIG148, H01L 21283

Patent

active

052702529

ABSTRACT:
Platinum Schottky contacts remaining stable up to 800.degree. C. have been produced. The adhesion of the platinum deposited at slightly elevated temperatures is good. Platinum provides a metallization that is physically rugged and thermally stable. The Schottky contacts are made on B-Silicon carbide.

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