Method of forming patterned oxide superconducting films and Jose

Details Method of forming patterned oxide superconducting films and Jose Method of forming patterned oxide superconducting films and Jose

1991-06-27

1993-07-13

Beck, Shrive

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505702, 505728, 427 63, 427526, 427529, 257 31, B05D 512, B05D 306

Patent

active

052273644

ABSTRACT:
A method of forming a fine groove on a superconducting thin film. A superconducting oxide thin film is formed on a MgO substrate, and a damaged layer is formed thereon by irradiating the superconducting thin film with focused ion beams to such a degree that not sputter is generated and the crystalline structure of the superconducting thin film is disturbed. The damaged layer is then removed by treatment with a strong alkali such as KOH. Thus, a fine groove is effectively formed. By inserting an oxide layer between the substrate and the superconducting thin film, a Josephson junction device suitable for superconducting transistors is produced.

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