Method of forming patterned films

Details Method of forming patterned films Method of forming patterned films

2007-04-10

2007-04-10

Schilling, Richard L. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Transfer procedure between image and image layer, image...

C430S258000, C156S232000, C156S234000, C427S146000, C427S248100, C427S255600, C427S294000, C427S250000

Reexamination Certificate

active

10456472

ABSTRACT:
This method forms a patterned film. The method prepares a transfer member having a transfer surface on which asperities are formed in accordance with a film pattern to be formed, performs stripping treatment on surfaces of at least ridges formed on the transfer surface of the transfer member, thereafter forms a thin film formed by a technology of vacuum film formation on the surfaces of the at least ridges formed on the transfer surface of the transfer member and transfers the thin film formed on the surfaces of at least ridges of the transfer member onto a substrate, thereby forming the patterned film on the substrate.

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