Method of forming parylene-diaphragm piezoelectric acoustic...

Details Method of forming parylene-diaphragm piezoelectric acoustic... Method of forming parylene-diaphragm piezoelectric acoustic...

2005-02-22

2005-02-22

Alanko, Anita (Department: 1765)

Acoustics

Diaphragm

Microphone type

C181S164000, C181S167000, C381S173000, C381S190000, C381S191000, C381S423000, C381S426000, C029S594000, C216S002000, C216S099000

Reexamination Certificate

active

06857501

ABSTRACT:
A micromachined acoustic transducer comprising a parylene diaphragm piezoelectric transducer. The parylene diaphragm has far lower stiffness than the silicon nitride. The method for fabricating the parylene diaphragm acoustic transducer utilizes a prestructured disphragm layer utilizing silicon nitride which is compatible with high temperature semiconductor process. A silicon nitride layer is patterned and partially removed after forming the parylene diaphragm layer in order to enhance the structural qualities of the parylene diaphragm. The diaphragm may be flat or dome-shaped.

REFERENCES:
patent: 4607145 (1986-08-01), Ravinet et al.
patent: 4783821 (1988-11-01), Muller et al.
patent: 5209118 (1993-05-01), Jerman
patent: 5479061 (1995-12-01), Bobbio et al.
patent: 5490220 (1996-02-01), Loeppert
patent: 5870351 (1999-02-01), Ladabaum et al.
patent: WO 9924744 (1999-05-01), None

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