Method of forming optical waveguides by ion implantation

Details Method of forming optical waveguides by ion implantation Method of forming optical waveguides by ion implantation

1990-01-18

1991-11-19

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 431, 427164, 427165, 427162, 2504923, 2504922, B05D 306, C23C 1404

Patent

active

050665146

ABSTRACT:
An optical wave guide is formed by implanting at least two ionic species capable of forming an oxide, a nitride or a halide into the surface of a substrate.

REFERENCES:
patent: 4145457 (1979-03-01), Kersten
patent: 4262056 (1981-04-01), Hubler et al.
patent: 4521443 (1985-06-01), Naik et al.
patent: 4774103 (1988-09-01), Kamigaito et al.
patent: 4789642 (1988-12-01), Lorenzo et al.
patent: 4840816 (1989-06-01), Appleton et al.
patent: 4847504 (1989-07-01), Aitken

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