Method of forming optical images, apparatus for carrying out...

Details Method of forming optical images, apparatus for carrying out... Method of forming optical images, apparatus for carrying out...

2008-07-29

2008-07-29

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S077000, C430S030000, C359S619000

Reexamination Certificate

active

07405807

ABSTRACT:
An optical image is formed in a resist layer (5) by a number of subilluminations, in each of which an array of light valves (21 25) and a corresponding array (40) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer (5) is displaced relative to the arrays (21 25, 40) The scale of the optical image in the resist layer (5) is measured and this scale is compared with the scale of the image required to be written If there is a difference, the spacing between the light converging elements (43) is physically altered to adjust the substrate scale.

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Dario Gil, et al: Lithographic Patterning and Confocal and Henry I. Smith, Aug. 2000, pp. 2881-2885.
Written Opinion of the International Searching Authority PCT/IB2004/051434, (Aug. 24, 2005).

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