Method of forming optical images, a control circuit for use...

Details Method of forming optical images, a control circuit for use... Method of forming optical images, a control circuit for use...

2004-08-09

2008-12-02

Lee, John R (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C369S067000

Reexamination Certificate

active

07459709

ABSTRACT:
An optical image is formed in a radiation-sensitive layer (5), by a number of sub-illuminations, in each of which an array of light valves (21-25) and a corresponding array (40) of converging elements (43) are used to form a pattern of spots in the resist layer (5) in accordance with a sub-image pattern. Between the sub-illuminations, the resist layer (5) is displaced relative to the arrays (21-25, 40). The lens array (40) may be tilted with respect to the scan area, such that each resist layer area is scanned by a number of spots. In addition, some spot overlap also occurs in a direction perpendicular to the scan direction. This spot redundancy is utilised by selectively reducing the intensity, or switching off, one or more of the redundant spots so as to alter the position of an edge of a device feature, i.e. “fine tune” it.

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Dario Gil, et al: Lithographic Patterning and Confocal Imaging with Zone Plates, Aug. 2000, pp. 2881-2885.

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