Method of forming nanofluidic channels

Details Method of forming nanofluidic channels Method of forming nanofluidic channels

2007-01-30

2007-01-30

Purvis, Sue A. (Department: 1734)

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

C156S237000, C156S247000, C977S780000, C977S840000, C977S882000

Reexamination Certificate

active

10436657

ABSTRACT:
A method of forming nanofluidic enclosed channels includes providing a first substrate having a layer of a first material disposed thereon. A plurality of nanoscale slots is formed along a second substrate using nanolithography, etching, or other disclosed techniques. The first substrate is then bonded to the second substrate such that the layer of the first material on the first substrate is adjacent the plurality of slots on the second substrate to define a plurality of enclosed nanofluidic channels therethrough.

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