Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Patent
1998-11-23
2000-08-08
Diamond, Alan
Batteries: thermoelectric and photoelectric
Photoelectric
Cells
136252, 136261, 257 51, 257 52, 257 55, 257 49, 257 66, 257428, 257431, 438485, 438486, 438487, 438 96, 438 97, 438 57, 427585, 427588, C23C 1624, C23C 1650, H01L 3120, H01L 31075, H01L 21205
Patent
active
061004669
ABSTRACT:
Provided is a method of forming a microcrystalline silicon film by a plasma CVD, which comprises introducing a high frequency electromagnetic wave into a film forming space through an electrode to induce a plasma thereby forming a deposited film on a substrate, wherein the relation of 400<Q<10000 is satisfied when Q is defined as Q=P.multidot.f.sup.2 /d where d (cm) is the distance between the substrate and the electrode, P (Torr) is the pressure of the film forming space during formation of the deposited film, and f (MHz) is the frequency of the high frequency electromagnetic wave-forming method of microcrystalline silicon film for forming a microcrystalline silicon film by plasma CVD, wherein Q defined as Q=P.multidot.f.sup.2 /d satisfies the relational formula of 400<Q<10000 where d (cm) is a distance between a substrate on which a deposited film is to be formed, and an electrode to which a high frequency electromagnetic wave for inducing a plasma is guided, P (Torr) is a pressure during formation of the deposited film, and f (MHz) is a frequency of the high frequency electromagnetic wave. This can provide a method of forming the microcrystalline silicon film suitable for the i-type layer of the pin type solar cell at a high rate, notwithstanding using a low-temperature process, without using a high-temperature process.
REFERENCES:
patent: 4933203 (1990-06-01), Curtins
patent: 5677236 (1997-10-01), Saitoh et al.
Keppner, H., et al. "Scope of VHF Plasma Deposition for Thin-Film Silicon Solar Cells", Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference--vol. 25, pp. 669-672, May 1996.
Fisher, D., et al. , "The `Micromorph` Solar Cell: Extending A-Si:H Technology Towards Thin Film Crystalline Silicon", Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference--vol. 25, pp. 1053-1060, May 1996.
Canon Kabushiki Kaisha
Diamond Alan
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