Method of forming micro-structures and nano-structures

Details Method of forming micro-structures and nano-structures Method of forming micro-structures and nano-structures

2006-05-12

2008-07-22

Toledo, Fernando L. (Department: 2823)

Semiconductor device manufacturing: process

Electron emitter manufacture

C438S778000, C438S799000, C977S815000, C977S900000, C977S939000

Reexamination Certificate

active

07402445

ABSTRACT:
Methods of forming a nano-structure for electron extraction are disclosed. One method of forming a nano-structure comprises irradiating an area on a first surface of a thermal conductive film to melt the area across the film. The film is insulated on a second surface to provide two-dimensional heat transfer across the film. The liquid density of the film is greater than the solid density thereof. The method further comprises cooling the area inwardly from the periphery thereof to form a nano-structure having an apical nano-tip for electron extraction.

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