Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1998-04-03
2000-09-05
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427250, 42725523, 42725528, 42725539, 427255391, 427255394, C23C 1600
Patent
active
061139831
ABSTRACT:
A new low temperature method for nanostructured metal and ceramic thin film growth by chemical vapor deposition (CVD) involves the use of a low pressure co-flow diffusion flame reactor to react alkali metal vapor and metal halide vapor to deposit metal, alloy and ceramic films. The reaction chemistry is described by the following general equation:
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Hendricks Jay H.
Zachariah Michael R.
King Roy V.
The United States of America as represented by the Secretary of
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