Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1992-05-28
1993-07-27
Schilling, Richard L.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
430269, 430346, 430348, 430494, 430495, 430945, 430947, 430964, 427 10, 427555, 427596, 427557, G03C 172, G03F 100
Patent
active
052309703
ABSTRACT:
A process of radiation-induced formation of a uniform metal or metal oxide region suitable for device application or for repairing transparent defects in pattern metal films of lithographic masks has been found. The process requires that the heat evolved during the radiation-induced reactions be carefully limited to produce the desired uniformity.
REFERENCES:
patent: 4328303 (1982-05-01), Ronn et al.
patent: 4444801 (1984-04-01), Hongo et al.
patent: 4463073 (1984-07-01), Miyauchi et al.
patent: 4636403 (1987-01-01), Fisanick et al.
Randall et al., "Repair of X-rays . . . ", J. Vac. Sci. Techn., B 3(1), Jan./Feb. 1985, pp. 262-264.
Gross et al., "Laser Direct-Write . . . ", J of Applied Physics, Feb. 1987.
Atwood Donald K.
Fisanick Georgia J.
Gross Michal E.
Katzir Abraham
Wolk Gary L.
AT&T Bell Laboratories
Schilling Richard L.
Schneider Bruce S.
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