Method of forming metal pattern including a schottky diode

Details Method of forming metal pattern including a schottky diode Method of forming metal pattern including a schottky diode

1995-05-05

1996-10-29

Tsai, H. Jey

Fishing, trapping, and vermin destroying

437904, 148DIG140, H01L 21265

Patent

active

055696147

ABSTRACT:
An insulating film is formed on the surface of the base of a semiconductor, and a portion of the insulating film is removed to cause the surface to appear outside. The exposed surface is terminated with hydrogen, and then energy beams are applied to selectively remove the terminating hydrogen. Metal is selectively deposited on the portion terminated with left hydrogen atoms.

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