Method of forming metal oxide film by using metal alkoxide solut

Details Method of forming metal oxide film by using metal alkoxide solut Method of forming metal oxide film by using metal alkoxide solut

1990-12-19

1992-08-11

Bell, Janyce

Coating processes

Electrical product produced

Transparent base

4271262, 4271263, 427165, 427226, B05D 506

Patent

active

051377497

ABSTRACT:
The invention relates to a sol-gel method for forming a metal oxide film, e.g. TiO.sub.2 film or TiO.sub.2 -SiO.sub.2 film, on a substrate by applying a solution of at least one metal alkoxide to the substrate to form a sol film on the substrate, drying the sol film to cause it to turn into a gel film by hydrolysis and baking the gel film. According to the invention the viscosity of the metal alkoxide solution is adequately increased, preferably to 3-30 cP at 20.degree. C., by the addition of a combination of a hydroxypropyl cellulose of which 2 wt % aqueous solution has a viscosity of 150-400 cP at 20.degree. C. and another hydroxypropyl cellulose of which 2 wt % aqueous solution has a viscosity of 6-10 cP at 20.degree. C. Metal oxide films formed by this method are free from minute cracks and excellent in optical characteristics and durability. By this method it is possible to form a metal oxide film as thick as about 300 nm without repeating the application of the alkoxide solution to the substrate.

REFERENCES:
patent: 4397666 (1983-08-01), Mishima et al.
patent: 4708821 (1987-11-01), Shimokawa
patent: 4874462 (1989-10-01), Makita et al.
patent: 4943542 (1990-07-01), Hayashi

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