Method of forming metal material film with controlled color char

Details Method of forming metal material film with controlled color char Method of forming metal material film with controlled color char

1993-06-02

1995-10-17

Utech, Benjamin L.

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427531, 427566, 4272481, 4272553, 427294, 20419216, B05A 306, C23C 1600

Patent

active

054589282

ABSTRACT:
The disclosed method of forming a high-function material film such as a ZrN thin film on a substrate in a vacuum chamber allows the color tone and uniformity of the film to be controlled. Gaseous nitrogen and gaseous oxygen, or nitrogen ions and oxygen ions, are supplied to the substrate while hard material atoms such as Zr atoms are emitted from an evaporation source toward the substrate. A supply partial pressure of the gaseous oxygen is set at a value within a range from about 10.sup.-5 Torr to about 10.sup.-4 Torr.

REFERENCES:
patent: 2539149 (1951-01-01), Miller
patent: 3900636 (1975-08-01), Curry et al.
patent: 4861669 (1989-08-01), Gillery
patent: 4920006 (1990-04-01), Gillery
patent: 4933058 (1990-06-01), Bache et al.
patent: 4938857 (1990-07-01), Gillery
patent: 5053245 (1991-10-01), Kiyamo et al.
patent: 5064682 (1991-11-01), Kiyama et al.

Affiliated with

Also associated with

Rating

Method of forming metal material film with controlled color char does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming metal material film with controlled color char, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming metal material film with controlled color char will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-595607