Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1995-06-07
2000-08-29
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
42725528, 42725529, 42725531, 42725532, 505445, 505473, C23C 1600
Patent
active
061105295
ABSTRACT:
A method of forming on a substrate a metal film, comprising depositing said metal film on said substrate via chemical vapor deposition from a metalorganic complex of the formula:
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Baum Thomas H.
Gardiner Robin A.
Glassman Timothy E.
Gordon Douglas
Kirlin Peter S.
Hultquist Steven J.
King Roy V.
Zitzmann Oliver A.M.
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