Method of forming low capacitance ESD device and structure...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material

Reexamination Certificate

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C438S022000, C438S047000, C438S296000, C438S297000, C438S424000, C257S051000, C257S106000, C257S199000, C257S461000, C257S509000, C257S603000, C257S929000, C257SE21644

Reexamination Certificate

active

08039359

ABSTRACT:
In one embodiment, the ESD device uses highly doped P and N regions deep within the ESD device to form a zener diode that has a controlled breakdown voltage.

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