Optical: systems and elements – Lens – With support
Reexamination Certificate
2011-04-05
2011-04-05
Ben, Loha (Department: 2873)
Optical: systems and elements
Lens
With support
C359S619000
Reexamination Certificate
active
07920343
ABSTRACT:
Micro-electrical-mechanical (MEMS) wafers in which a lens is formed on a micro-electrical-mechanical structure. The micro-electrical-mechanical wafers can comprise a substrate, MEMS structures, and a lens array. A method of forming a micro-electrical-mechanical wafer comprises providing a substrate, forming a micro-electrical-mechanical structure on the substrate, forming a carrier, forming a lens array on the carrier, and transferring the lens array from the carrier onto the micro-electrical-mechanical structure. The lens array is placed above the micro-electrical-mechanical structure.
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Boettiger Ulrich
Duparre Jacques
Hegde Shashikant
Lake Rick
Aptina Imaging Corporation
Ben Loha
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