Fishing – trapping – and vermin destroying
Patent
1990-11-20
1993-03-30
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437190, 437192, 437197, 437228, 156643, H01L 21283
Patent
active
051983885
ABSTRACT:
Disclosed is a method which enables a sufficient anti-corrosion processing of an interconnection pattern. An interconnection layer is formed on a semiconductor substrate. The interconnection layer is selectively etched by employing a halogen-type gas, so as to form an interconnection pattern. The interconnection pattern is irradiated with deep UV light in a vacuum of 1.times.10.sup.-4 Torr or less in degree. Even if a protection film including halogen is formed on the side wall of the interconnection pattern upon reactive ion etching, this method enables sufficient removal of the halogen in a sufficient time and a complete anti-corrosion processing of the interconnection pattern.
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Chaudhuri Olik
Mitsubishi Denki & Kabushiki Kaisha
Ojan Ourmazd S.
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