Method of forming integrated optical circuit planar waveguide tu

Optical waveguides – Planar optical waveguide

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385130, 385123, 385 14, G02B 610

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058945385

ABSTRACT:
Planar waveguide turning mirrors in integrated optical circuits are formed using at least one light beam including a wavelength in a particular wavelength range that is absorbed by the cladding layer of the circuit to vaporize a particular region of the corresponding cladding layer at the desired angle to form the recessed light deflector surface of the turning mirror. In addition, it is also possible to form the cladding layer on a substrate comprising a material that enables light wavelengths in the particular wavelength range to be substantially transmitted through the substrate to advantageously enable greater flexibility in the light beam energy and/or the time the beam is incident on the cladding layer during the vaporization process.

REFERENCES:
patent: 4624000 (1986-11-01), Streifer et al.
patent: 4750799 (1988-06-01), Kawachi et al.
patent: 5135605 (1992-08-01), Blonder et al.
patent: 5719981 (1998-02-01), Katoh et al.
C.H. Henry et al., "Glass Waveguides on Silicon for Hybrid Optical Packaging", 7 J. Lightwave Technol., pp. 1530-1539 (1989).
H.M. Presby, "Silica Integrated Optical Circuits", (SPIE Optical Engineering Press, Bellingham, WA 1996).

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