Optical waveguides – Integrated optical circuit
Patent
1994-03-17
1998-06-09
Bovernick, Rodney B.
Optical waveguides
Integrated optical circuit
385130, G02B 612
Patent
active
057648204
ABSTRACT:
The invention relates to a method of fabricating an electro-optical device which comprises integrating a semiconductor component with a polymeric optical waveguide component. According to the invention, a semiconductor component obtained by epitaxial lift-off (ELO) is embedded in a waveguide device which in addition to a polymeric optical waveguide structure comprises an appropriate cavity. The invention further pertains to an integrated electro-optical device attainable by means of this ELO technique. Notably, it concerns an integrated electro-optical device in which the polymeric waveguide component and the semiconductor component are integrated on a substrate made of a different material from that of the semiconductor component, preferably a material with good heat dissipation, such as silicon. Preferably, the polymeric waveguide component comprises a polymer in which waveguide channels have been provided by bleaching.
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De Dobbelaere Peter M. C.
Van Daele Peter P.
Akzo Nobel nv
Bovernick Rodney B.
Fennelly Richard P.
Morris Louis A.
Wise Robert E.
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