Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent
1998-08-12
2000-05-09
Pianalto, Bernard
Coating processes
Direct application of electrical, magnetic, wave, or...
Pretreatment of substrate or post-treatment of coated substrate
427123, 427331, 4274071, 4274191, 427595, B05D 306
Patent
active
060601302
ABSTRACT:
A method for forming a silicon oxide film, SiO.sub.x, where X=1 or 2, on an electrode of a thin film transistor, e.g., for a liquid crystal display device. The method includes the steps of: forming an electrode on a substrate; forming an organic silicon-containing thin film on exposed surfaces of the electrode and the substrate; providing a gaseous atmosphere of oxygen or air about the electrode and the substrate; and irradiating the thin film with ultra violet light to produce radicals, including silicon radicals, from the thin film. The irradiation also produces oxygen radicals from the atmosphere. The silicon and oxygen radicals react to form the silicon oxide.
LG Electronics Inc.
Pianalto Bernard
LandOfFree
Method of forming insulation films for liquid crystal display does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of forming insulation films for liquid crystal display, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming insulation films for liquid crystal display will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1062626