Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Patent
1994-10-24
1998-09-22
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
438 69, 438 70, 438 73, H01L 2100
Patent
active
058113207
ABSTRACT:
Methods of etching optical elements in association with photosensitive elements are described. In some of the arrangements, the optical elements are formed integrally with a substrate containing the photosensitive elements. In other arrangements, an optical element is mounted to a package, or the like, containing the substrate and photosensitive elements. In other arrangements, two or more optical elements are employed, including conventional refractive elements, refractive focusing elements, and refractive beam splitting elements. Utility as solid state image sensors is discussed. Utility for monochromatic and color imaging is discussed.
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