Method of forming film stack having under layer for...

Details Method of forming film stack having under layer for... Method of forming film stack having under layer for...

2007-06-18

2009-06-02

Meeks, Timothy H (Department: 1792)

Coating processes

Applying superposed diverse coating or coating a coated base

C427S255150

Reexamination Certificate

active

07541065

ABSTRACT:
A method is provided for forming a film stack in which a first film including a first polymer is formed on a substrate. A second film, which can include a second polymer other than the first polymer, is formed to have an inner surface disposed on the first film. The second film can have a thickness at which a free energy of the second film would be negative if the second film were disposed directly on the substrate. Desirably, the resulting second film is substantially free of dewetting defects.

REFERENCES:
Li et al, Inhibition of thin polystyrene film dewetting via phase separation, Polymer 44 (2003), p. 5833-5841, Available online Jul. 18, 2003.

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