Method of forming film pattern, device, method of...

Details Method of forming film pattern, device, method of... Method of forming film pattern, device, method of...

2006-02-03

2009-06-16

Toledo, Fernando L (Department: 2895)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S584000, C438S674000, C257SE21174

Reexamination Certificate

active

07547567

ABSTRACT:
A method of forming a film pattern by disposing functional liquid on a substrate includes: forming banks on the substrate; disposing the functional liquid in regions partitioned by the banks; and drying the functional liquid disposed on the substrate. The forming of the banks includes forming a thin film on the substrate, the thin film being made of a material for forming the banks, performing lyophobic treatment on a surface of the thin film, and patterning the thin film into the shapes of the banks.

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