Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1999-03-01
2000-07-11
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 58, H01J 902
Patent
active
060864427
ABSTRACT:
The invention comprises methods of forming field emission devices. In but one implementation, a method of forming a field emission device includes forming an electron emission substrate comprising emitters and an electrically conductive extraction grid formed outwardly of the emitters. The extraction grid is supported and spaced from the emitters by an insulative mass. An electrically conductive layer is substantially selectively deposited over the grid and emitters relative to the insulative mass. After the depositing, the electron emission substrate is joined with an electron collector substrate. In one implementation, a method of forming a field emission device includes depositing an electrically conductive layer over the grid and emitters, with the depositing forming the electrically conductive layer over at least some exposed surfaces of the insulative mass. The conductive layer is etched away from the insulative mass while leaving at least a portion of the conductive layer remaining over outermost portions of the emitters. After the etching, the electron emission substrate is joined with an electron collector substrate. In one implementation, an electrically conductive layer is deposited over the grid and emitters. Only a portion of the electrically conductive layer is etched away from the grid and emitters after the depositing. After the etching, the electron emission substrate is joined with an electron collector substrate.
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Sandhu Gurtej S.
Sharan Sujit
Micro)n Technology, Inc.
Ramsey Kenneth J.
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