Semiconductor device manufacturing: process – Having diamond semiconductor component
Reexamination Certificate
2005-08-30
2005-08-30
Fourson, George (Department: 2823)
Semiconductor device manufacturing: process
Having diamond semiconductor component
C438S459000, C438S519000, C438S977000, C257SE21122, C148SDIG001
Reexamination Certificate
active
06936497
ABSTRACT:
A process is described whereby a wafer is manufactured, a die from the wafer, and an electronic assembly including the die. A thin diamond layer is formed on a sacrificial wafer, and an integrated circuit is then formed on the thin diamond layer. The sacrificial wafer is then removed to expose the thin diamond layer. The resulting combination wafer is subsequently diced into individual dies. Each die has an exposed diamond layer forming the majority of the die and serving to conduct heat from the integrated circuit to a backside of the die, from where the heat can convect or be conducted away from the die.
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Chrysler Gregory M.
Ravi Kramadhati V.
Blakely , Sokoloff, Taylor & Zafman LLP
Fourson George
Pham Thanh V
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