Method of forming electron beam emitting tungsten filament

Details Method of forming electron beam emitting tungsten filament Method of forming electron beam emitting tungsten filament

1995-12-19

1998-03-17

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

H01J 902

Patent

active

057279780

ABSTRACT:
Electron beam emitting filaments having a tip with a radius of curvature less than about 50 .ANG. are produced using focused ion beam milling. In one embodiment, platinum is deposited on a tungsten loop electron beam filament and sharpened using focused ion beam milling to a radius of curvature less than about 50 .ANG..

REFERENCES:
patent: 5145435 (1992-09-01), Ayers
patent: 5227699 (1993-07-01), Busta
patent: 5239863 (1993-08-01), Kado et al.
patent: 5494179 (1996-02-01), Hori et al.
L.C. Hopkins et al., "Polycrystalline tungsten and iridium probe tip preparation with a Ga.sup.+ focused ion beam", Journal of Vacuum Science Technology B 13(2), Mar./Apr. 1995, pp. 335-337.
"Energy Beam Sciences Tungsten Filaments for Electron Microscopes," Energy Beam Science, Inc., Catalog 3, pp. 1 and 3-6.
L.R. Harriott, "Beam-size measurements in focused ion beam systems," Journal of Vacuum Science & Technology A, Second Series, vol. 8, No. 2, Mar./Apr. 1990, pp. 899-901.

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