Method of forming electrical pathways in indium-tin-oxide coatin

Details Method of forming electrical pathways in indium-tin-oxide coatin Method of forming electrical pathways in indium-tin-oxide coatin

1996-04-10

1997-03-04

Turner, Archene

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

4271261, 4271263, 427523, 427331, B05D 512, C23C 1408

Patent

active

056077319

ABSTRACT:
An electrical device includes a substrate having an ITO coating thereon, a portion of which is conductive and defines at least one electrical pathway, and the balance of the ITO being insulative. The device is made by the following general steps:

REFERENCES:
patent: 4255474 (1991-03-01), Smith, Jr.
J. Haisma, et al., "Resistance Modification of Indium Oxide Layers by Laser Annealing and Ion Bombardment Respectively", Philips Journal of Research vol. 41, p. 77 (1986).
T. Serikawa, et al., "Studies of H.sub.2 .sup.+ Implantation Into Indium-Tin-Oxide Films", Nuclear Instrumentation Methods B vol. 37/38, p. 732 (1989).
Y. Shigesato, et al., "Study of the Effect of Ion Implantation on the Electrical and Microstructural Properties of Tin-Doped Indium Oxide Thin Films", Journal of Applied Physics vol. 73, p. 3805 (1993).
Y. Shigesato, et al., "Laser and Ion Beam Modification of Materials", Proceedings of the 1993 International Conference on Advanced Materials, I, Yamada, et al., ed. (1994).
T.E. Haynes, et al., "Donor generation from native defects induced by In+ implantation into tin-doped indium oxide", Journal of Applied Physics vol. 77, p. 2572 (1994).
S. Pongratz, "Info highway will be viewed on flat panel displays," R&D Magazine,p. 27, Apr. 1994.
D.F. Cox, et al., "Surface Reconstructions of Oxygen Deficient SnO.sub.2 (110)", Surface Science vol. 224, pp. 121-142, 1989.

Affiliated with

Also associated with

Rating

Method of forming electrical pathways in indium-tin-oxide coatin does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming electrical pathways in indium-tin-oxide coatin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming electrical pathways in indium-tin-oxide coatin will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2144560