Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-06-20
2006-06-20
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S846000, C029S831000, C427S097200, C427S097700, C438S675000
Reexamination Certificate
active
07062850
ABSTRACT:
A method of forming an electrical conductor, comprising forming electrically conductive segments incorporating electromigration-inhibiting plugs. A row of windows is formed in a planar surface and electromigraation-inhibiting material is deposited over the planar surface and into the windows to provide electromigration-inhibiting plugs in the windows. The plugs may be formed by depositing an electromigration-inhibiting liner in the windows and then depositing electrically conductive material to fill the windows. Portions of either or both of the plugs and conductive segments are removed such that the plugs and conductive segments have a coplanar surface. The plugs may be formed in windows in an electrically conductive layer defining the conductive segments. Embodiments of the method may be employed in manufacture of integrated circuit conductor.
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Atakov Eugenia
Bair Lawrence
Clement John
Gieseke Bruce
Shepela Adam
Hewlett--Packard Development Company, L.P.
Tugbang A. Dexter
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