Metal fusion bonding – Process – Preplacing solid filler
Patent
1993-09-27
1995-01-17
Heinrich, Samuel M.
Metal fusion bonding
Process
Preplacing solid filler
22818022, 228 563, 205112, 205123, 205125, H01L 2160
Patent
active
053819462
ABSTRACT:
An integrated circuit chip having solder bumps thereon may be tested using a temporary substrate having substrate pads corresponding to locations of the input/output pads on the chip and having a sacrificial conductor layer on the temporary substrate pads. The solder bumps are placed adjacent the corresponding sacrificial metal layer and heated to form an electrical and mechanical connection between the chip and the temporary substrate. The chip is then tested and/or burned-in on the temporary substrate. After testing/burn-in, the sacrificial metal layer is dissolved into the solder bumps by heating. The integrated circuit chip, including a solder bump having the dissolved sacrificial metal layer therein, may be easily removed from the temporary substrate. Solder bumps may also be formed on the temporary substrate and transferred to unbumped chips. Solder bumps with different characteristics may be formed by varying the current-time product to each individual pad of the temporary substrate during a plating operation.
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Koopman Nicholas G.
Rinne Glenn A.
Turlik Iwona
Yung Edward K.
Heinrich Samuel M.
MCNC
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