Method of forming dielectric film and dielectric film

Details Method of forming dielectric film and dielectric film Method of forming dielectric film and dielectric film

2005-06-07

2005-06-07

Thompson, Craig A. (Department: 2813)

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

C438S707000, C438S710000, C438S780000

Reexamination Certificate

active

06903027

ABSTRACT:
A first interlayer insulating film (3) having low dielectric constant is formed on an underlying insulating film (2) and a second interlayer insulating film (4) is formed on the first interlayer insulating film (3). Subsequently, a photoresist (5) having a pattern with openings above regions in which copper wirings are to be formed is formed on the second interlayer insulating film (4). Using the photoresist (5) as an etching mask, the second interlayer insulating film (4) and the first interlayer insulating film (3) are etched, to form a recess (6). Next, an ashing process using oxygen gas plasma (7) is performed, to remove the photoresist (5). This ashing process is performed under a plasma forming condition that the RF power is 300 W, the chamber pressure is 30 Pa, the oxygen flow is 100 sccm and the substrate temperature is 25° C. That provides a method of forming a dielectric film and a structure thereof, which allows suppression of a rise in dielectric constant of an interlayer insulating film, which is caused by a change of Si—CnH2n+1bond into Si—OH bond in the film.

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