Method of forming crystal

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With a step of measuring – testing – or sensing

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117 94, 117 95, 117 90, 117100, 117105, 117935, 437238, 437241, C30B 2504

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056907362

ABSTRACT:
A crystal is formed by applying crystal forming treatment to a substrate, the surface of the substrate being divided into nonnucleation surface exhibiting a small nucleation density and nucleation surface having a sufficeintly small area to allow crystal growth from a single nucleus and exhibiting a larger nucleation density than the nonnucleation surface and the nonnucleation surface being constituted of the surface of a buffer layer to alleviate generation of stress in the crystal formed.

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Bloem, J. et al., "Nucleation and growth of silicon films by chemical vapour deposition," 8062 Philips Technical Review, vol. 41, pp. 60-69 (1983/84).
Sze, S.M., "Semiconductor Devices Physics and Technology," pp. 354-357, AT&T Bell Laboratories (1985).
Jastrzebski, "SCI by CVD: Epitaxial Lateral Over Growth (ELO) Process--Review", Journal of Crystal Growth, vol. 63 (1983) pp. 493-526.
Jastrzebski et al, Growth Process of Silicon Over SiO.sub.2, by CVD: Epitaxial Lateral Overgrowth . . . , J. Electrochem Soc. Solid-State Sci. and Tech, Jul. 83, 1571-1580.
Claassen et al., The Nucleation of CVD Silicon on SiO.sub.2 and Si.sub.3 N.sub.4 Substrates, J. Electrochem. Soc., Solid-State Sci. and Tech., vol. 127, No. 1, Jan. 1980, pp. 194-202.

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