Method of forming contact openings having concavo-concave shape

Details Method of forming contact openings having concavo-concave shape Method of forming contact openings having concavo-concave shape

1994-05-11

1995-11-07

Fourson, George

Fishing, trapping, and vermin destroying

437195, 437981, 437982, 437947, 148DIG161, 257774, H01L 21283

Patent

active

054647940

ABSTRACT:
A new method of metallization using a new design of metal contact shape, contact/via profile, and metal lines having considerably reduced current density and improved electromigration of metal lines is achieved. Metal contacts are formed in a rectangular shape instead of a square shape with the wider side perpendicular to the current direction. Contact openings are made having concavo-concave profiles which can provide a wider conducting cross-sectional area than can conventional openings with a vertical profile near the contact bottom. Gaps are formed within wide and high current metal lines so that current density can be effectively lowered by utilizing the whole metal line uniformly.

REFERENCES:
patent: 4812419 (1989-03-01), Lee et al.
patent: 5356834 (1994-10-01), Sugimoto et al.
patent: 5364817 (1994-11-01), Luv et al.
patent: 5368682 (1994-11-01), Park

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