Fishing – trapping – and vermin destroying
Patent
1990-02-09
1991-01-15
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437245, 437946, 437949, 437 41, 437193, 437200, 148DIG17, 148DIG6, H01L 21283, H01L 21336
Patent
active
049853724
ABSTRACT:
A method of forming a conductive layr includes the steps of performing dry etching of a surface of a substrate in a first chamber maintained in a nonoxidizing atmosphere to remove a natural oxide from the surface of the substrate, transferring the substrate from the first chamber to a second chamber while the nonoxidizing atmosphere is maintained, and forming a refractory metal film on the surface of the substrate by low-pressure CVD in the second chamber.
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Chaudhuri Olik
Quach T. N.
Tokyo Electron Limited
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