Method of forming compound stage MEM actuator suspended for mult

Details Method of forming compound stage MEM actuator suspended for mult Method of forming compound stage MEM actuator suspended for mult

1995-05-17

1996-04-09

Fourson, George

Fishing, trapping, and vermin destroying

437901, 437927, H01L 21465

Patent

active

055061753

ABSTRACT:
A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.

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