Method of forming carbon nanotube emitters and field...

Details Method of forming carbon nanotube emitters and field... Method of forming carbon nanotube emitters and field...

2007-01-09

2007-01-09

Williams, Joseph (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

C445S050000, C445S049000

Reexamination Certificate

active

10979139

ABSTRACT:
A method of forming carbon nanotube emitters and a method of manufacturing an FED using such carbon nanotube emitters includes: forming a carbon nanotube layer on a substrate on which a plurality of electrodes are formed, coating a photoresist on the carbon nanotube layer, patterning the photoresist such that the photoresist only remains above the electrodes, removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as a etch mask, and removing the photoresist pattern and forming the carbon nanotube emitters on the electrodes.

REFERENCES:
patent: 6440763 (2002-08-01), Hsu
patent: 6692791 (2004-02-01), Chang et al.
patent: 6811457 (2004-11-01), Cheng et al.
patent: 6825595 (2004-11-01), Jin et al.
patent: 6835591 (2004-12-01), Rueckes et al.
patent: 2003/0184203 (2003-10-01), Inoue et al.

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