Method of forming borderless contacts

Details Method of forming borderless contacts Method of forming borderless contacts

1989-12-21

1990-07-31

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437228, 437203, 437245, H01L 21283

Patent

active

049446827

ABSTRACT:
A method of forming semi-conductor devices components wherein there are at least two exposed conducting regions having passivating material overlying said regions. The passivating material is subject to etching by a given etchant. At least one, but less than all of the regions are covered with a material, preferably an electrical conducting material, which also preferably covers additional electrical conducting or semi-conducting regions. Thereafter, all the regions are subjected to the given etchant, but only those regions having the passivating material not covered with the etch resistant material are removed. Preferably, at this point, a layer of conducting material is deposited over all the regions.

REFERENCES:
patent: 4631806 (1986-12-01), Poppert
patent: 4648175 (1987-03-01), Metz
patent: 4677736 (1987-07-01), Brown

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