Method of forming an insulating film

Details Method of forming an insulating film Method of forming an insulating film

1990-05-11

1991-04-23

Pianalto, Bernard

Coating processes

Electrical product produced

Welding electrode

427 58, 4272554, 4272557, 427314, 4273741, 427377, 427379, 4273981, B05D 306

Patent

active

050099264

ABSTRACT:
In a method of forming an insulating film on a substrate wherein a substrate is cleaned by heating it in an atmosphere of a reducing gas, and heating it in an oxidizing gas, and then growing an insulating film by heating the substrate in an atmosphere of a gas used to grow the film in the same reaction chamber, the insulating film is grown in stages and an insulating film grown in each stage is crystallized by heat treatment with a temperature higher than the heat treatment for the film growth. This can be accomplished by interposing a heat treatment with the higher temperature between successive film growth stages, or by using a higher temperature for the film growth for each stage with a temperature higher than that for the film growth in the preceding stage.

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