Method of forming an array of densely packed discrete metal micr

Details Method of forming an array of densely packed discrete metal micr Method of forming an array of densely packed discrete metal micr

1991-05-29

1993-02-09

Bell, Janyce

Coating processes

Direct application of electrical, magnetic, wave, or...

Chemical vapor deposition

427100, 427124, 427250, 427277, 427294, B05D 306

Patent

active

051851784

ABSTRACT:
An array of densely packed discrete metal microspheres which may be deformable and electrically conductive may be formed on a substrate by a method including the steps of providing a substrate having a depositing surface in the chamber forming a metal vapor in the chamber and depositing the metal vapor on the depositing surface, the depositing surface having a temperature at or above the melting point of the metal.

REFERENCES:
patent: 4486464 (1984-12-01), Young
patent: 4714047 (1987-12-01), Ikeda et al.
patent: 5017550 (1991-05-01), Shioya

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