Method of forming an acoustic resonator

Details Method of forming an acoustic resonator Method of forming an acoustic resonator

2005-09-20

2005-09-20

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S594000, C029S846000, C029S847000, C310S311000

Reexamination Certificate

active

06944922

ABSTRACT:
A of forming an acoustic resonator of one inventive aspect includes depositing at least one primer layer, depositing an electrode layer containing Molybdenum on the upper surface of the primer layer, and depositing a layer may piezoelectric material on the uppermost electrode layer. The primer layer may included a generally crystalline material, the upper surface of which has an atomic spacing that matches the atomic spacing of the electrode layer to within about 15% and is not of cubic crystalline form.

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Y. Yoshino et al., “Effect of Buffer Electrodes In Crystallization of Zinc Oxide Thin Film for Thin Film Bulk Acoustic Wave Resonator,” Mai. Res. Soc. Symp. Proc. vol. 605, 2000 Materials Research Society, pp. 267-272.

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