Method of forming a variable width channel

Details Method of forming a variable width channel Method of forming a variable width channel

1985-10-21

1989-04-25

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Holographic process, composition, or product

430323, 430330, 372 48, G03H 1118

Patent

active

048247472

ABSTRACT:
A method of forming a channel of varying width in a body comprises the steps of forming a plurality of masking elements having an opening therethrough intersecting a plurality of the elements on a surface of the body, partially flowing the elements into the opening to form a masking pattern having a variable width opening therethrough, and removing portions of the exposed body to form the channel with a sidewall having a surface contour corresponding to an edge of the masking pattern.

REFERENCES:
patent: 2854336 (1958-09-01), Gutknecht
patent: 3669673 (1972-06-01), Chung Sen Ih et al.
patent: 4022932 (1977-05-01), Feng
patent: 4023993 (1977-05-01), Scifres et al.
patent: 4099999 (1978-07-01), Burnham et al.
patent: 4251780 (1981-02-01), Scifres et al.
patent: 4302729 (1981-11-01), Burnham et al.
patent: 4359776 (1982-11-01), Acket et al.
patent: 4369513 (1983-01-01), Umeda et al.
Abita, Joseph L., "Improved Conventional Photolithography by Relief Mask Processing," Solid State Technology, pp. 48-49, Jun. 1974.

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